Arc Jet Type
Manufacturer
NEMS Tech.- Arc plasma design.
- Multiple reactive gases can be used.
- Energy concentration and good results.
- Processing speed is fast.
- The processing pitch (from the sample) is high.
- Can be single or online modular.
- Indirect plasma.
- Can be applied to various materials and materials of various shapes.
- Reaction gas: CDA, N2, O2.
- Low reaction gas consumption and low operating cost.
- Effective width of plasma: 10mm.
- Processing speed: 50mm/sec~300mm/sec.
- Processing pitch (from sample): 3mm~15mm.
- Fast start speed <0.5sec.
- High plasma stability and uniformity.
- Indirect plasma, no ESD.
- Can be applied to various materials and materials of various shapes.
Applications
- Clean the ITO Finger in the LCM.
- Surface cleaning and upgrading of the various components and non-electronic components and materials.
- Application of growing films.
- Various materials lamination or pre-coating process.
- Universal LCD and touch front end of the line and Back End Of the line of various processes.