PPS-8200p1/8300p1

Application use:

• Supports a wide variety of applications.
• Compatible with 6/8/12 inch lithography for WL-CSP, IGBT, CIS, etc.

Features:

• Broadband exposure (automatic switching ghi line, gh line, i line linked to the recipe).
• Variable NA function (0.16 and 0.1 variable).
• Reticle design format for up to 8 fields.
• Optics protected from resist outgassing and chemicals in the surrounding environment.

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