PPS-8500


Application use:

  • Stepper specialized for large panels

Features:

  • Highly warped substrates due to heat treatment and distorted rewiring surfaces.
  • Optimal suction method for warped panel.
  • Auto focus function with multi-point focus.
  • Alignment function for panel expansion and contraction.
  • Split global alignment, Shot by Shot (Die by Die) alignment, and scaling by reticle.

Request information material by e-mail

More Info