FlexBlue Sputtering

The FlexBlue machine is designed and built for the single side, uniform vacuum sputter deposition of different metal and non-metal layers. The film is applied onto flexible substrates from roll to roll in a batch type process. With its both side motor-driven move-out sections the FlexBlue provides an operator-friendly design for loading and unloading the substrate rolls, as well as for process maintenance.

• Advanced deposition tool for lowest production cost
• Compact design with minimized footprint
• Easy setup and maintenance access at open chamber
• Batch system capacity highly flexible to match existing line capacity
• Ten cathode design adaptable for multilayer stack coatings
• Cathode design adaptable to best match required coating width
• Enables high track pitch resolution and reduces chemical waste in FPCB production

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